SE-PERC高效电池碱抛前氧化工艺研究
申开愉，李雪方，吕涛，郭丽，杨飞飞，郭卫
（山西潞安太阳能科技有限责任公司，山西长治046000）
摘要： 近年来，PERC 工艺叠加激光SE 选择性发射极技术和碱背面抛光技术已然成为新增PERC 产线的标准配置。
但激光的高频脉冲会使SE 重掺杂区的PSG （磷硅玻璃） 层遭到一定程度的破坏，造成后续碱抛工艺中使用的化学药液
会腐蚀没有保护的重掺杂区，最终导致电池片效率降低。通过对比两种不同的碱抛前氧化方式在激光光斑宽度、方阻以
及电池性能方面的差异，选取更适合产线的前氧化工艺方式，从而实现碱抛和SE 两种工艺对电池效率的正向叠加提升。
关键词： SE 选择性发射；碱抛；前氧化；电池效率
中图分类号： TM914.4     文献标志码： A     文章编号： 2095-0802-(2022)10-0102-03
Pre-oxidation Process for Alkali Backside Polishing of SE-PERC High-efficiency Battery
SHEN Kaiyu, LI Xuefang, LYU Tao, GUO Li, YANG Feifei, GUO Wei
(Shanxi Lu'an Photovoltaics Technology Co., Ltd., Changzhi 046000, Shanxi, China)
Abstract: In recent years, the PERC process superimposed laser SE selective emitter technology and alkali backside polishing
technology have become the standard configuration of new PERC production lines. However, the PSG (Phosphosilicate Glass) layer
of SE deeply doped region will be damaged to a certain extent by the high-frequency pulse of the laser, resulting in the corrosion
of the chemical liquid used in the subsequent alkali backside polishing process, so that the cell efficiency will be decreased
ultimately. This paper compared the differences in laser spot width, square resistance and cell performance between the two
different pre-oxidation methods for alkali backside polishing, in order to choose the better pre-oxidation process that is more
suitable for the production, which can improve the cell efficiency through the positive converged improvement between the alkali
backside polishing and the SE.

Key words: SE selective emitter; alkali backside polishing; pre-oxidation; cell efficiency